PE-2200 Etch Chamber A — Wet Clean Isolation
Full energy isolation of plasma etch chamber A for scheduled chamber wet clean. Cl2/BCl3 metal etch chemistry.
It refers to equipment that does not exist and illustrates the elements 29 CFR 1910.147(c)(4)(ii) requires a procedure to contain. It is not a document to adopt. Under (c)(4)(i) the employer must develop and document energy control procedures specific to their own machines, and under (c)(6) must inspect them at least annually.
10 points, in sequence
Chlorine (Cl2) process gas manual valve at the valve manifold box. TOXIC gas; purge required before break.
Boron trichloride (BCl3) manual valve at the valve manifold box. TOXIC/corrosive; purge required.
N2 purge valve for process gas lines. Used DURING isolation to purge toxics; not isolated for the work.
Chamber vacuum isolation valve to the roughing pump. Vacuum/pressure energy.
RF generator supply disconnect (13.56 MHz). Electrical + STORED capacitor energy; requires discharge dwell.
Tool main electrical disconnect, 480V 3ph at the facility panel. Electrical energy.
Compressed dry air supply to pneumatic valves and wafer handler. Pneumatic energy.
CDA bleed to atmosphere downstream of the supply valve. Relieves stored pneumatic pressure.
Process cooling water supply to chuck and chamber walls. Hydraulic + thermal.
Process cooling water return. Hydraulic + thermal.
What your site must supply
This example is structurally complete and factually generic. The things below are the things only you can know — and they are exactly what makes a procedure yours.
- Your own asset and isolation-point tag numbers. The tags shown are illustrative and refer to equipment that does not exist.
- The actual location of every disconnect, valve and vent on your equipment.
- Measured stored-energy magnitudes and the dwell time required to dissipate them.
- Your verification method for each point, and who is authorised to perform it.
- Any additional energy sources present on your equipment and absent here.
Author this properly, once
Setyr holds procedures like this as living documents — bound to real isolation points, with lock registries, group lockout, person-in-charge custody and periodic review built in.